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Equipment
Magnetron sources and power supply for deposition of low temperature hard coatings
Purpose of equipment
Deposition of low temperature hard coatings by pulsed magnetron sputtering at temperature bellow 200 °C.
Access of equipment
Responsible for equipment:
PhD Peter Panjan
Deposition of 3µm thick hard coating on substrates which occupy the usable volume 400 mm in diameter and 400 mm in height cost app. 600 € (the cost include the target, gases and energy consumption, mechanical preatreatment and cleaning of substrates, loading, fixturing, personnel cost). Total time needed for one batch is app. 8 hour.
Deposition of 3µm thick hard coating on substrates which occupy the usable volume 400 mm in diameter and 400 mm in height cost app. 600 € (the cost include the target, gases and energy consumption, mechanical preatreatment and cleaning of substrates, loading, fixturing, personnel cost). Total time needed for one batch is app. 8 hour.
Research projects (1) Legend
| no. | Code | Title | Period | Head | No. of publicationsNo. of publications |
|---|---|---|---|---|---|
| 1. | L2-9189 | 7/1/2007 - 6/30/2010 | 2,397 |
ARIS research and infrastructure programmes (1) Legend
| no. | Code | Title | Period | Head | No. of publicationsNo. of publications |
|---|---|---|---|---|---|
| 1. | P2-0082 | 1/1/2004 - 12/31/2008 | 4,517 |
Organisations (1)
| no. | Code | Research organisation | City | Registration number | No. of publicationsNo. of publications |
|---|---|---|---|---|---|
| 1. | 0106 | Ljubljana | 5051606000 | 95,032 |