Equipment source: ARIS

Time of flight secondary ion mass spectrometer TOF SIMS

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Purpose of equipment
TOF-SIMS spectrometer provides detailed elemental and molecular information about surfaces, thin layers and interfaces of organic and inorganic materials like polymers, biomaterials, semiconductors, coatings, paint, metals, ceramics, glass, pharmaceuticals...Mass resolution is about 10.000, lateral resolution is 100 nm and analysed depth is 2-3 monolayers.
Access of equipment
Responsible for equipment: PhD Janez Kovač
Application for external users is possible, contact person dr. Janez Kovač (janez.kovac@ijs.si, 01 477 3403)
ARIS research and infrastructure programmes (1) Legend
no. Code Title Period Head No. of publications
1.  P2-0082  TankThin-film structures and plasma surface engineering  1/1/2009 - 12/31/2014  PhD Miran Mozetič  5,051 
Organisations (1)
no. Code Research organisation City Registration number No. of publications
1.  0106  Jožef Stefan Institute  Ljubljana  5051606000  95,032 
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