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Equipment source: ARIS

Instrument for functionalization of surfaces of modern materials

Purpose of equipment
Instrument can be used for preparation of thin, multicomponent inorganic and organic films as well as for functionalization of solid surfaces. It is possible to perform heat treatment, ion bombardment and plasma functionalization of surfaces. Instrument is directly connected with XPS spectrometer for characterization of treated surfaces and deposited films without exposure to air atmosphere.
Access of equipment
Responsible for equipment: PhD Janez Kovač
Application for external users is possible, contact person dr. Janez Kovač
ARIS research and infrastructure programmes (1) Legend
no. Code Title Period Head No. of publicationsNo. of publications
1.  P2-0082  TankThin-film structures and plasma surface engineering  1/1/2004 - 12/31/2008  PhD Anton Zalar  4,517 
Organisations (1)
no. Code Research organisation City Registration number No. of publicationsNo. of publications
1.  0106  Jožef Stefan Institute  Ljubljana  5051606000  95,032 
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