Equipment source: ARIS

Laboratory sputtering equipment

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Purpose of equipment
Sputtering of metal electrodes on different materials. Option sputtering up to three different metal layers in a single cycle.
Access of equipment
Responsible for equipment: PhD Barbara Malič
Sputtering of metallic electrode on different materials(Au, Pt, Ag, Ti, Cr, Cu, alloys etc.). Price and availabillity by arragement.
Organisations (1)
no. Code Research organisation City Registration number No. of publications
1.  0106  Jožef Stefan Institute  Ljubljana  5051606000  98,178 
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