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Equipment source: ARIS

XPS spectrometer

Purpose of equipment
Characterization of surfaces and thin films with X-Ray photoelectron spectroscopy – XPS (ESCA). XPS spectrometer provides quantitative data on surface composition and type of chemical bonds of elements in the thin surface layer of thickness of 3 – 5 nm. Analysed samples can be metals, oxides, composites, powders, ceramics, polymers… By ion sputtering it is possible to analyse depth distribution of elements in subsurface region and in thin films up to depth of about 200 nm.
Access of equipment
Responsible for equipment: PhD Janez Kovač
Application for external users is possible, contact person dr. Janez Kovač
ARIS research and infrastructure programmes (1) Legend
no. Code Title Period Head No. of publicationsNo. of publications
1.  P2-0082  TankThin-film structures and plasma surface engineering  1/1/2004 - 12/31/2008  PhD Anton Zalar  4,517 
Organisations (1)
no. Code Research organisation City Registration number No. of publicationsNo. of publications
1.  0106  Jožef Stefan Institute  Ljubljana  5051606000  95,032 
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