Equipment source: ARIS

Mass spectrometer with the ability to measure the energy distribution of the ions

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Purpose of equipment
Mass spectrometer is used for measurements of mass and energy distribution of ions in low-pressure plasmas (up to 10 Pa).
Access of equipment
Responsible for equipment: PhD Miha Čekada
Advance contact to the address matjaz.panjan@ijs.si.
ARIS research and infrastructure programmes (1) Legend
no. Code Title Period Head No. of publications
1.  P2-0082  Thin-film structures and plasma surface engineering  1/1/2015 - 12/31/2021  PhD Miran Mozetič  5,005 
Organisations (1)
no. Code Research organisation City Registration number No. of publications
1.  0106  Jožef Stefan Institute  Ljubljana  5051606000  95,032 
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