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Equipment
Generator with a high nominal power for the excitation of inductively coupled plasma
Purpose of equipment
The equipment will be used for excitation of inductively coupled plasma. The nominal power of the generator is high, mainly due to the need for high plasma power density in H-mode. At high power densities, the plasma can be maintained at higher pressures (medium vacuum), which consequently means a higher density of reactive particles.
Access of equipment
Responsible for equipment:
PhD Rok Zaplotnik
Equipment is usually available Monday through Friday between 8:00 and 14:00. It is necessary to talk about the use beforehand with the head of the Department of Surface Engineering prof. Miran Mozetič.
Equipment is usually available Monday through Friday between 8:00 and 14:00. It is necessary to talk about the use beforehand with the head of the Department of Surface Engineering prof. Miran Mozetič.
Research projects (2) Legend
| no. | Code | Title | Period | Head | No. of publicationsNo. of publications |
|---|---|---|---|---|---|
| 1. | L2-2617 | 9/1/2020 - 8/31/2024 | 4,388 | ||
| 2. | L2-1834 | 7/1/2019 - 6/30/2022 | 2,940 |
ARIS research and infrastructure programmes (1) Legend
| no. | Code | Title | Period | Head | No. of publicationsNo. of publications |
|---|---|---|---|---|---|
| 1. | P2-0082 | 1/1/2015 - 12/31/2021 | 5,005 |
Organisations (1)
| no. | Code | Research organisation | City | Registration number | No. of publicationsNo. of publications |
|---|---|---|---|---|---|
| 1. | 0106 | Ljubljana | 5051606000 | 95,032 |