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Equipment source: ARIS

Mass spectrometer HIDEN HAL/3F RC 301

Purpose of equipment
Equipment is used for gas chemical analysis
Access of equipment
Responsible for equipment: PhD Janez Šetina
External service is posible after previous appointment of vacuum systems.
ARIS research and infrastructure programmes (1) Legend
no. Code Title Period Head No. of publicationsNo. of publications
1.  P2-0056  Vacuum science and materials for electronics  1/1/2004 - 12/31/2008  PhD Janez Šetina  1,188 
Organisations (1)
no. Code Research organisation City Registration number No. of publicationsNo. of publications
1.  0206  Institute of Metals and Technology  Ljubljana  5051622000  5,602 
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