Equipment source: ARIS

Ultrahigh vacuum system for characterizing getter materials

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Purpose of equipment
Equipment is used for determining sorption properies of non-evaporable getters (NEGs) based on Ti- and Zr- alloys. NEGs are applied in small-volume static vacuums devices to maintain UHV to XHV conditions. Equipment represents the base of a static gas-sorption method (developed at IMT) for NEG characterization.
Access of equipment
Responsible for equipment: PhD Janez Šetina
External service is posible after previous appointment of vacuum systems.
ARIS research and infrastructure programmes (1) Legend
no. Code Title Period Head No. of publications
1.  P2-0056  Vacuum science and materials for electronics  1/1/2004 - 12/31/2008  PhD Janez Šetina  1,188 
Organisations (1)
no. Code Research organisation City Registration number No. of publications
1.  0206  Institute of Metals and Technology  Ljubljana  5051622000  5,602 
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