Equipment
High resolution field emission scanning electron microscope with EDX microanalyser
Sirion FEG is a high-resolution field electron microscope with field electron emission. Particles in the nanometer range can be observed and analyzed. Sirion has a Schottky electron origin, where we obtain a small diameter electron beam and high electron density by field electron emission. The result is high resolution, even at low voltages: 1.0 nm at 15 kV or 2.0 nm at 1 kV. The microscope is equipped with energy dispersion spectrometer EDS Oxford INCA 350 for microchemical analysis. It enables qualitative and quantitative microchemical analysis in a point and on the surface, as well as qualitative line analysis and surface distribution of elements. Elements from beryllium onwards can be analyzed.
Responsible for equipment:
PhD Franc Zupanič
Use is possible on the basis of prior agreement
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