Equipment source: ARIS

mask aligner

Edit
Purpose of equipment
Mask aligner MA BA6 Gen 4 is a system designed for research institutions, universities and sample production. The main emphasis is on flexibility both in procedures with wavelengths 365nm and 405 nm in 4 different modes of mapping, from proximity to vacuum.
Access of equipment
Responsible for equipment: PhD Janez Trontelj
Mask aligner is located in Laboratory for Microelectronics. To use the set-up the head of LMFE prof. dr. Janez Trontelj should be contacted.
ARIS research and infrastructure programmes (1) Legend
no. Code Title Period Head No. of publications
1.  P2-0257  Systems on chip with integrated micromechanical THz, optical, magnetic and electrochemical sensors  1/1/2014 - 12/31/2019  PhD Janez Trontelj  1,901 
Organisations (1)
no. Code Research organisation City Registration number No. of publications
1.  1538  University of Ljubljana, Faculty of Electrical Engineering  Ljubljana  1626965000  29,298 
Confirmation required
Views history
Favourite