Loading...
Equipment source: ARIS

Thin-film deposition tool

Purpose of equipment
Thermal atomic layer deposition tool for thin-film deposition
Access of equipment
Responsible for equipment: PhD Marko Topič
The device is located in the Laboratory of Photovoltaics and Optoelectronics. For the possibility of using the development environment, please contact the head of the LPVO, Prof. Dr. Marko Topič. Given the intensive use of the development environment for our own R&D needs, use is only possible in the late afternoon hours.
Organisations (1)
no. Code Research organisation City Registration number No. of publicationsNo. of publications
1.  1538  University of Ljubljana, Faculty of Electrical Engineering  Ljubljana  1626965000  29,298 
Views history
Favourite