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Equipment source: ARIS

Plasma system for the deposition of thin films with plasma of molecular gases on larger samples

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Purpose of equipment
The system is designed for preparation of industrial-size samples. The device enables thin film coatings by using various precursors on samples up to 0.4 m in diameter and power regulation for sustaining low-pressure plasma up to 12 kW.
Access of equipment
Responsible for equipment: PhD Miran Mozetič
URL: https://www.ijs.si/ijsw/Znotraj%20hi%C5%A1e/Desno?action=AttachFile&do=get&tar get=ARRS_Evidenca_opreme_2021.xlsx
Equipment is usually available Monday through Friday between 8:00 and 14:00. It is necessary to talk about the use beforehand with the head of the Department of Surface Engineering.
Research projects (2) Legend
no. Code Title Period Head No. of publications
1.  L2-2616  Selected area functionalization of polymeric components by gaseous plasma  9/1/2020 - 8/31/2023  PhD Miran Mozetič  3,399 
2.  J2-1720  Ecologically friendly in-situ synthesis of ZnO nanoparticles for the development of protective textiles  7/1/2019 - 6/30/2022  PhD Marija Gorjanc  3,397 
ARIS research and infrastructure programmes (1) Legend
no. Code Title Period Head No. of publications
1.  P2-0082  Thin-film structures and plasma surface engineering  1/1/2015 - 12/31/2021  PhD Miran Mozetič  4,657 
Organisations (1)
no. Code Research organisation City Registration number No. of publications
1.  0106  Jožef Stefan Institute  Ljubljana  5051606000  90,767 
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