Loading...
Equipment source: ARIS

Low vacuum scanning electron microscope with iFIB

Purpose of equipment
Quanta 200 3D is an environmental scanning electron microscope with double beams - electron and ion. The microscope is called "environmental" or "ESEM" because it allows you to work at different pressures and up to 100% humidity. At high vacuum, we can observe conductive samples (e.g. metal samples or non-conductive samples coated with a conductive layer). At low vacuum, we can observe both conductive and non-conductive samples without prior preparation. In "ESEM" mode, we can observe all types of samples (polymeric materials, ceramics, non-conductive surface layers, geological, biological and medical samples). It is also possible to observe wet, greasy and dirty samples (fresh plants, living beings or tissues) and in-situ processes. We can observe and process materials (etching the surface of the sample, cutting, polishing the cut surface, drawing various patterns on different materials and processing materials in the nano- and micro-area. Applying platinum protects the surface from damage caused by ionic cutting, allows more accurate cutting, reduces or eliminates the electrical charge of the non-conductive sample and allows conductive connections between the elements.
Access of equipment
Responsible for equipment: PhD Franc Zupanič
URL: http://www.fs.um.si/raziskovanje/raziskovalna-oprema/
Use is possible on the basis of prior agreement
ARIS research and infrastructure programmes (2) Legend
no. Code Title Period Head No. of publicationsNo. of publications
1.  I0-0029  Univerzitetni center za elektronsko mikroskopijo (Slovene)  1/1/2009 - 12/31/2014  PhD Rebeka Rudolf  1,469 
2.  P2-0120  Tehnologije metastabilnih materialov s kovinsko osnovo (Slovene)  1/1/2004 - 12/31/2008  PhD Ivan Anžel  3,778 
Organisations (1)
no. Code Research organisation City Registration number No. of publicationsNo. of publications
1.  0795  University ob Maribor, Faculty of mechanical engineering  Maribor  5089638010  23,928 
Views history
Favourite