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Equipment source: ARIS

High resolution field emission scanning electron microscope with EDX microanalyser

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Purpose of equipment
Sirion FEG is a high-resolution field electron microscope with field electron emission. Particles in the nanometer range can be observed and analyzed. Sirion has a Schottky electron origin, where we obtain a small diameter electron beam and high electron density by field electron emission. The result is high resolution, even at low voltages: 1.0 nm at 15 kV or 2.0 nm at 1 kV. The microscope is equipped with energy dispersion spectrometer EDS Oxford INCA 350 for microchemical analysis. It enables qualitative and quantitative microchemical analysis in a point and on the surface, as well as qualitative line analysis and surface distribution of elements. Elements from beryllium onwards can be analyzed.
Access of equipment
Responsible for equipment: PhD Franc Zupanič
URL: http://www.fs.um.si/raziskovanje/raziskovalna-oprema/
Use is possible on the basis of prior agreement
ARIS research and infrastructure programmes (1) Legend
no. Code Title Period Head No. of publications
1.  P2-0120  Tehnologije metastabilnih materialov s kovinsko osnovo (Slovene)  1/1/2004 - 12/31/2008  PhD Ivan Anžel  3,778 
Organisations (1)
no. Code Research organisation City Registration number No. of publications
1.  0795  University ob Maribor, Faculty of mechanical engineering  Maribor  5089638010  23,928 
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