Chemical interaction of low pressure oxygen and hydrogen plasma with solid surfaces.

Code

J2-9057 (C) - included in ARIS records

Head

PhD Rudolf Ročak

Period

1/1/1997 - 12/31/1999

Science

Engineering sciences and technologies (10)

Reseacher status

Researcher (10)
Junior expert or technical associate (0)

Education

Doctor's degree (4)
Master's degree (2)
Other (4)

Sex

Woman (1)
Man (9)

Status

Employed at RO and RRD (3)
No data on employment in RO (1)
Not updated (3)
Retired (2)
Deceased (1)

No. of publications

0 (1)
10–99 (6)
100–999 (2)
1,000–9,999 (1)

Projects / Programmes source: ARIS

source: ARIS

Chemical interaction of low pressure oxygen and hydrogen plasma with solid surfaces.

Research activity

Code	Science	Field	Subfield
2.09.02	Engineering sciences and technologies	Electronic components and technologies	Electronic components

Keywords

electric discharges, RF radiofrequency discharges, hydrogen plasma, H-plasma interaction with surface, oxygen plasma, O-plasma interaction with surface, surface cleaning, plasma cleaning, surface activation, catalytic probes, nickel catalytic probes, Langmuir probes

Evaluation (rules)

source: COBISS

Evaluation of bibliographic research performance indicators according to ARIS methodology

Citations Citations for bibliographic records in COBIB.SI that are linked to records in citation databases

source: WoS

source: Scopus

source: COBISS

Researchers (10)

no.	Code	Name and surname	Research area	Role	Period	No. of publicationsNo. of publications
1.	01694	Zlatko Bele	Electronic components and technologies	Researcher	1997 - 1999	17
2.	05640	MSc Brane Kren	Electronic components and technologies	Researcher	1997 - 1999	15
3.	10429	PhD Miran Mozetič	Electronic components and technologies	Researcher	1997 - 1999	1,353
4.	09619	Karol Požun	Electronic components and technologies	Researcher	1997 - 1999	56
5.	09105	Borut Praček	Electronic components and technologies	Researcher	1997 - 1999	113
6.	05647	PhD Rudolf Ročak	Electronic components and technologies	Head	1997 - 1999	20
7.	10497	MSc Sonja Spruk	Electronic components and technologies	Researcher	1997 - 1999	29
8.	13059	Miroslav Stipančič	Electronic components and technologies	Researcher	1999	0
9.	01718	PhD Iztok Šorli	Electronic components and technologies	Researcher	1997 - 1999	63
10.	01741	PhD Anton Zalar	Electronic components and technologies	Researcher	1998 - 1999	383

Organisations (1)

no.	Code	Research organisation	City	Registration number	No. of publicationsNo. of publications
1.	0341	MIKROIKS, microelectronics engineering, consulting and service	Ljubljana	5286646	70

Abstract

Interaction of low pressure weakly ionized hydrogen and oxygen plasma with solid surfaces will be studied. Plasma parameters will be measured with Langmuir and catalytic probes, while the surface phenomena will be determined with AES, ESCA, SEXAFS, SEM, alpha step and paint test. A new type of catalytic probe for measurement of H density in highly dissociated plasma and in gaps between samples will be constructed and tested. Quantitative data on the rate of reduction of thin oxide layers on metal samples versus plasma parameters will be obtained. The rate of low temperature oxidation of plastic materials exposed to oxygen plasma will be determined and the resultant improved paintability, wettability and adhesion will be tested. Discharge cleaning is nowadays widely used in different industrial processes. It is gradually replacing classical wet chemical cleaning, since wet cleaning often leads to poor cleanliness of surfaces, and because of ecological reasons. The side product of wet cleaning is a large quantity of used chemicals, which often cannot be recycled, while environmental pleasant destruction of the chemicals is expensive. The best exchange for wet chemical cleaning is the use of a plasma of reactive gases. Organic impurities are effectively removed by oxygen plasma, while oxide impurities are reduced by hydrogen plasma. Interaction of reactive particles, produced in hydrogen and oxygen plasma, with solid surfaces, is still not well described. In particular, there is a shortage of quantitative data on the rate of removal of impurities as a function of the flow of reactive particles onto a surface. Results of sample treatment in plasma are often expressed in the terms of some characteristic of a material being treated, such as surface energy, adhesion, wettability, contact resistance, etc. The subject of the proposed research is the role of plasma parameters on chemical reactions on solid surfaces. Plasma parameters will be measured with different Langmuir probes, and a specially constructed catalytic probe, which will allow for the determination of the density of chemical reactive neutral particles in the vicinity of samples. Reactions on surfaces will be monitored with the AES, ESCA and SEXAFS, while the results of plasma treatment of samples will be controlled with the Alpha step method, SEM and wettability test. The rate of reduction of metal oxide thin layers, as a function of the thickness of the oxide layer and the flow of neutral hydrogen atoms on surfaces, will be determined. The result of the investigation of interaction of oxygen plasma with organic materials will be the determination of the rate of oxidation as a function of the density of oxygen ions and neutral atoms in the vicinity of samples. Proposed investigations will give us a basic knowledge needed for development of technologies of discharge cleaning, which Slovenian industry will have to introduced in the next years in order to fulfill severe ecological rules already effective in the EC countries.