Projects / Programmes source: ARIS

Thermal stability of sputter deposited multilayer structures

Research activity

Code Science Field Subfield
2.21.00  Engineering sciences and technologies  Technology driven physics   

Code Science Field
T155  Technological sciences  Coatings and surface treatment 
multilayer structures, hard protective coatings, sputtering, standard reference materials, Rutherford backscattering, hot forging, ceramic thin films, wear resistance, interfacial reaction, oxidation, microhardness, adhesion, weight gain
Evaluation (rules)
source: COBISS
Researchers (4)
no. Code Name and surname Research area Role Period No. of publicationsNo. of publications
1.  03494  PhD Marijan Maček  Electronic components and technologies  Researcher  1998 - 1999 
2.  15603  Andrej Mohar    Researcher  1998 - 1999 
3.  00085  PhD Boris Navinšek  Materials science and technology  Researcher  1998 - 1999 
4.  09090  PhD Peter Panjan  Materials science and technology  Head  1998 - 1999 
Organisations (2)
no. Code Research organisation City Registration number No. of publicationsNo. of publications
1.  0106  Jožef Stefan Institute  Ljubljana  5051606000  18 
2.  1538  University of Ljubljana, Faculty of Electrical Engineering  Ljubljana  1626965  65 
The tribological performance of hard coatings is, for given substrate material, mainly governed by the coating hardness, toughness, fracture resistance, the contact temperature and chemistry. One possible way to achieve high hardness in combination with high toughness and high coating fracture resistance is to use multilayer coatings. This type of coatings are generally considered to have properties superior to single-layered coatings. Several multilayer PVD coatings consisting of TiN, CrN, TiAlN and CrCN layers deposited on high speed steel (HSS) were investigated. Multilayer coatings deposited on HSS substrates were evaluated with respect to fundamental properties such as morphology, microstructure, microhardness, adhesion and oxidation resistance. The investigation showed that the multilayer coatings have higher cracking resistance and better oxidation resistance than the single-layer coatings, while the microhardness of both systems is the same. Selected tools were protected with multilayer coatings and tested sucsesfully in industrial conditions. Rutherford backscattering spectrometry (RBS) and weight gain technique (WG) were used for determination of nitrogen, oxygen or carbon content in transition metal compound films. The accuracy of the RBS method was improved using two detectors as well as a sample in the form of a multilayer structure composed of two or more layers of metal compound and a layer of pure metal. Thin film samples characterized in this way could be an appropriate standard reference materials for conventional compositional depth profile analysis (e.g. AES, XPS). The interdiffusion and thermal stability of three types of metal/oxide (Cr/NiO, Cr2O3/Ni, Al2O3/Ti) were also studied with AES depth profiling. The main moving species and the activation energy for intefacial reactions were determined.
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