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Projects / Programmes source: ARIS

Ionsko in kemijsko črpanje v UV vakuumu (Slovene)

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Research activity

Code Science Field Subfield
2.09.05  Engineering sciences and technologies  Electronic components and technologies  Vacuum technologies 

Code Science Field
T001  Technological sciences  Electronics and Electrical technology 
T210  Technological sciences  Mechanical engineering, hydraulics, vacuum technology, vibration and acoustic engineering 
Keywords
vacuum, pumping, ion pump, magnetron, thin films, titanium compounds, hydrogen, sputtering
Evaluation (rules)
source: COBISS
Evaluation of bibliographic research performance indicators according to ARIS methodology
Citations Citations for bibliographic records in COBIB.SI that are linked to records in citation databases
source: WoS source: Scopus source: COBISS
Researchers (10)
no. Code Name and surname Research area Role Period No. of publications
1.  07480  Marjan Drab  Electronic components and technologies  Researcher  1999 - 2001  67 
2.  15703  PhD Janez Kovač  Electronic components and technologies  Researcher  1998 - 2001  670 
3.  10429  PhD Miran Mozetič  Electronic components and technologies  Researcher  1999 - 2001  1,352 
4.  03066  PhD Vincenc Nemanič  Electronic components and technologies  Researcher  1998 - 2001  245 
5.  15884  Janez Novak  Electronic components and technologies  Researcher  2000 - 2001  13 
6.  09105  Borut Praček  Electronic components and technologies  Researcher  1999 - 2001  113 
7.  01737  MSc Andrej Pregelj  Electronic components and technologies  Researcher  2000 - 2001  248 
8.  17622  Janez Trtnik    Researcher  1998 - 2001  18 
9.  01741  PhD Anton Zalar  Electronic components and technologies  Head  1999 - 2001  383 
10.  03366  Marko Žumer  Electronic components and technologies  Researcher  1999 - 2001  110 
Abstract
Characteristics of low pressure discharges in perpendicular electric and magnetic field with various electrode configuration will be studied. The generation of positive ions in the discharge and their interaction with the cathode surface will be analyzed. The sputtering coefficient as a function of the electrode configuration and the electric and magnetic field strength will be determined. Sorption of molecules and atoms of active gases on the anode and cathode surface will be studied. Samples of thin films of titanium compounds will be prepared and a study of hydrogen pumping by the samples will be performed. Optimal construction of multi-cell magnetron inserts for ion pumps according to the pumping speed, base pressure, life time and production costs will be determined.
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