Projects / Programmes
Novel Sensor and Actuator Structures”
January 1, 1999
- December 31, 2003
Code |
Science |
Field |
Subfield |
2.09.00 |
Engineering sciences and technologies |
Electronic components and technologies |
|
2.15.00 |
Engineering sciences and technologies |
Metrology |
|
Code |
Science |
Field |
T150 |
Technological sciences |
Material technology |
T170 |
Technological sciences |
Electronics |
T181 |
Technological sciences |
Remote sensing |
T190 |
Technological sciences |
Electrical engineering |
T115 |
Technological sciences |
Medical technology |
Researchers (9)
no. |
Code |
Name and surname |
Research area |
Role |
Period |
No. of publicationsNo. of publications |
1. |
11682 |
MSc Uroš Aljančič |
Electronic components and technologies |
Researcher |
2003 |
206 |
2. |
01926 |
PhD Slavko Amon |
Electronic components and technologies |
Head |
2001 - 2003 |
473 |
3. |
17125 |
Matjaž Cvar |
|
Researcher |
2001 - 2003 |
8 |
4. |
04721 |
PhD Andrej Levstek |
Electronic components and technologies |
Researcher |
2003 |
103 |
5. |
20186 |
PhD Matej Možek |
Electronic components and technologies |
Researcher |
2001 - 2003 |
270 |
6. |
02313 |
PhD Boštjan Peršič |
Energy engineering |
Researcher |
2001 - 2002 |
138 |
7. |
05075 |
PhD Drago Resnik |
Electronic components and technologies |
Researcher |
2001 - 2003 |
261 |
8. |
02303 |
PhD Gabrijel Tomšič |
Mathematics |
Researcher |
2001 - 2002 |
111 |
9. |
04383 |
PhD Danilo Vrtačnik |
Electronic components and technologies |
Researcher |
2001 - 2003 |
309 |
Organisations (1)
Abstract
In the center of the research work in the field of semiconductor, sensor and actuator structures today are investigations of basic effects occurring in these, as acknowledged by many experts from different fields, for future development of mankind basic structures. Based on detailed analysis of existing literature as well as on experiences obtained from our past research work in these fields, the following research programm is considered.
In the field of sensor structures for radiation detection, several topics of importance will be investigated: modeling and design of new improved detector structures; influence of detector structure on generated carriers collection efficiency; operation, structures and integration of JFETs; dependence of detector electric parameters on structural parameters; basic effects in detector processing procedure; measurement methods for improved characterisation.
In the field of Si and SiGe structures, several topics of importance will be investigated: new junction termination structures; breakdown and leakage properties of pn-junctions; high doping effects and related apparent band gap narrowing, effective mass model for wide temperature, doping and Ge content region; modeling; improved characterisation methods.
In the field of micromachining of silicon for 3D structures, several topics of importance will be investigated: modeling; advanced structures (new structures based on new crystall planes, bossed diaphragms, overpressure protection structures, piezoresistive and piezoelectric structures); protective layers; (an)isotropic etching; wafer bonding; multilevel micromachining; realization of sensor and actuator MEMS structures.
Most important scientific results
Final report
Most important socioeconomically and culturally relevant results
Final report