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Projects / Programmes source: ARIS

Uporabne tehnologije silicijevih senzorjev tlaka (Slovene)

Research activity

Code Science Field Subfield
2.09.02  Engineering sciences and technologies  Electronic components and technologies  Electronic components 

Code Science Field
T170  Technological sciences  Electronics 
Keywords
micromachining, silicon piezoresistive pressure sensors
Evaluation (rules)
source: COBISS
Researchers (9)
no. Code Name and surname Research area Role Period No. of publicationsNo. of publications
1.  11682  MSc Uroš Aljančič  Electronic components and technologies  Researcher  1998 - 2001  206 
2.  01926  PhD Slavko Amon  Electronic components and technologies  Head  1998 - 2001  473 
3.  08346  Darko Belavič  Electronic components and technologies  Researcher  1999 - 2001  682 
4.  17125  Matjaž Cvar    Researcher  1998 - 2001 
5.  19391  Mitja Jerlah    Researcher  1998 - 2001  115 
6.  17802  Ivan Lahne  Electronic components and technologies  Researcher  1999 - 2001 
7.  05075  PhD Drago Resnik  Electronic components and technologies  Researcher  1998 - 2001  261 
8.  05633  Stojan Šoba  Metrology  Researcher  1999 - 2001  32 
9.  04383  PhD Danilo Vrtačnik  Electronic components and technologies  Researcher  1998 - 2001  309 
Organisations (2)
no. Code Research organisation City Registration number No. of publicationsNo. of publications
1.  1538  University of Ljubljana, Faculty of Electrical Engineering  Ljubljana  1626965  27,762 
2.  1704  HIPOT-R&D Research and development in Technologies and Systems  Otočec  5981344  759 
Abstract
Research and study of mechnisms in the field of sensors and related technologies, based on previous experiences, with emphasys on silicon piezoresistive pressure sensors, will result in better insight into micromachining technologies and material properties of these devices. Improved knowledge of the field will enable new approaches in the design and fabrication of sensor structures. The proposed applicative research will also be used as the basis of the future developement work in Slovenia in the sensor field. Prototype chips of silicon pressure sensors will be designed and fabricated as a result of this work, supporting the slovenian industry in its endeavours to remain in hightec.
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