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Projects / Programmes source: ARIS

Characterization of interfaces and multilayer structures

Research activity

Code Science Field Subfield
2.09.06  Engineering sciences and technologies  Electronic components and technologies  Characterisation of electronic components and materials 

Code Science Field
T155  Technological sciences  Coatings and surface treatment 
Keywords
surfaces, interfaces, thin films, coatings, multilayer structures, phase transformation, diffusion, solid state reactions, ion mixing, depth profiling, depth resolution, AES, XPS, plasma, intermetallic compounds, new materials
Evaluation (rules)
source: COBISS
Researchers (8)
no. Code Name and surname Research area Role Period No. of publicationsNo. of publications
1.  18635  Tatjana Filipič    Researcher  2002 - 2004  24 
2.  08028  Miha Kocmur    Researcher  2002 - 2003  15 
3.  15703  PhD Janez Kovač  Electronic components and technologies  Researcher  2002 - 2004  680 
4.  10429  PhD Miran Mozetič  Electronic components and technologies  Researcher  2002 - 2004  1,356 
5.  09105  Borut Praček  Electronic components and technologies  Researcher  2002 - 2004  113 
6.  17622  Janez Trtnik    Researcher  2002 - 2004  18 
7.  20048  PhD Alenka Vesel  Electronic components and technologies  Researcher  2002 - 2003  695 
8.  01741  PhD Anton Zalar  Electronic components and technologies  Head  2002 - 2004  383 
Organisations (1)
no. Code Research organisation City Registration number No. of publicationsNo. of publications
1.  0106  Jožef Stefan Institute  Ljubljana  5051606000  91,408 
Abstract
Different model metal/metal and metal/oxide multilayer structures will be sputter deposited onto smooth silicon substrates. Well defined multilayers with known thin-film thicknesses and surface roughness will be depth profiled with high resolution Auger electron spectroscopy (AES) depth profiling using two ion beams and/or sample rotation technique, low ion beam energy and grazing ion incidence angle. To induce the interfacial reactions, the multilayer structures will be treated by heating and/or ion mixing. The composition, crystalline structure and surface topography of as-deposited and treated multilayers will be investigated by relevant methods such as AES, XPS, SEM, TEM, XRD, EXAFS and AFM. The obtained results will enable to determine thermodynamic and kinetic data which are not generally known for the early-stage interfacial reactions in thin films. The knowledge obtained in the frame of this work will help us at the characterization of technological samples. The results of the project are in particular foreseen to find their use in the fields of surface and interface science, thin-films and coatings technology and surface engineering.
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