Projects / Programmes
Characterization of interfaces and multilayer structures
Code |
Science |
Field |
Subfield |
2.09.06 |
Engineering sciences and technologies |
Electronic components and technologies |
Characterisation of electronic components and materials |
Code |
Science |
Field |
T155 |
Technological sciences |
Coatings and surface treatment |
surfaces, interfaces, thin films, coatings, multilayer structures, phase transformation, diffusion, solid state reactions, ion mixing, depth profiling, depth resolution, AES, XPS, plasma, intermetallic compounds, new materials
Researchers (8)
no. |
Code |
Name and surname |
Research area |
Role |
Period |
No. of publicationsNo. of publications |
1. |
18635 |
Tatjana Filipič |
|
Researcher |
2002 - 2004 |
24 |
2. |
08028 |
Miha Kocmur |
|
Researcher |
2002 - 2003 |
15 |
3. |
15703 |
PhD Janez Kovač |
Electronic components and technologies |
Researcher |
2002 - 2004 |
670 |
4. |
10429 |
PhD Miran Mozetič |
Electronic components and technologies |
Researcher |
2002 - 2004 |
1,350 |
5. |
09105 |
Borut Praček |
Electronic components and technologies |
Researcher |
2002 - 2004 |
113 |
6. |
17622 |
Janez Trtnik |
|
Researcher |
2002 - 2004 |
18 |
7. |
20048 |
PhD Alenka Vesel |
Electronic components and technologies |
Researcher |
2002 - 2003 |
688 |
8. |
01741 |
PhD Anton Zalar |
Electronic components and technologies |
Head |
2002 - 2004 |
383 |
Organisations (1)
no. |
Code |
Research organisation |
City |
Registration number |
No. of publicationsNo. of publications |
1. |
0106 |
Jožef Stefan Institute |
Ljubljana |
5051606000 |
90,348 |
Abstract
Different model metal/metal and metal/oxide multilayer structures will be sputter deposited onto smooth silicon substrates. Well defined multilayers with known thin-film thicknesses and surface roughness will be depth profiled with high resolution Auger electron spectroscopy (AES) depth profiling using two ion beams and/or sample rotation technique, low ion beam energy and grazing ion incidence angle. To induce the interfacial reactions, the multilayer structures will be treated by heating and/or ion mixing. The composition, crystalline structure and surface topography of as-deposited and treated multilayers will be investigated by relevant methods such as AES, XPS, SEM, TEM, XRD, EXAFS and AFM. The obtained results will enable to determine thermodynamic and kinetic data which are not generally known for the early-stage interfacial reactions in thin films. The knowledge obtained in the frame of this work will help us at the characterization of technological samples. The results of the project are in particular foreseen to find their use in the fields of surface and interface science, thin-films and coatings technology and surface engineering.