Integrated photodiode array ASIC research for accurate position measurement

The proposed project comprises the research and development of integrated photodiode array in CMOS technologies with optimal antireflection coating. Study of processing the input optical signals. System design for sensitivity matching of all photodiodes in the array and for automatic offset voltage correction. Design of a complete analog part of the optical microsystem with digital control of all system parameters. ASIC design with digital interface for communication with analog optical front-end processing unit. The proposed research would enable a new technology development for optical and micromechanical position sensors with a resolution of less than 100nm. Furthermore it allows a new method development for analog processing and design of optical integrated circuits. A direct result of the study is an upgrade of technological laboratory LMFE for fabrication of optical microsystems.