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Projects / Programmes source: ARIS

Oksidation of metals with reactive oxygen plasma

Research activity

Code Science Field Subfield
2.09.05  Engineering sciences and technologies  Electronic components and technologies  Vacuum technologies 

Code Science Field
T130  Technological sciences  Production technology 
T155  Technological sciences  Coatings and surface treatment 
Keywords
plasma, oxygen, composite, activation, etching, metal, oxidation, nanowires, commutators
Evaluation (rules)
source: COBISS
Researchers (9)
no. Code Name and surname Research area Role Period No. of publicationsNo. of publications
1.  22999  Tatjana Berce Alič  Materials science and technology  Researcher  2007 - 2009 
2.  15982  Marko Bogataj  Systems and cybernetics  Researcher  2007 - 2009 
3.  22289  PhD Uroš Cvelbar  Electronic components and technologies  Researcher  2007 - 2009  730 
4.  26476  PhD Aleksander Drenik  Electronic components and technologies  Junior researcher  2007 - 2009  692 
5.  15703  PhD Janez Kovač  Electronic components and technologies  Researcher  2007 - 2009  670 
6.  21019  Ludvik Kumar  Manufacturing technologies and systems  Researcher  2007 - 2009  22 
7.  27732  Peter Lukan  Systems and cybernetics  Researcher  2007 - 2009 
8.  10429  PhD Miran Mozetič  Electronic components and technologies  Head  2007 - 2009  1,352 
9.  29275  PhD Tjaša Vrlinič  Engineering sciences and technologies  Researcher  2008 - 2009  16 
Organisations (2)
no. Code Research organisation City Registration number No. of publicationsNo. of publications
1.  0106  Jožef Stefan Institute  Ljubljana  5051606000  90,624 
2.  1682  KOLEKTOR MOBILITY Upravljanje naložb d.o.o. (Slovene)  Idrija  5034558  237 
Abstract
Our industrial partner, Kolektor Idrija, has introduced microcomposite commutators to massive production. The technological process has been developed by our research team a couple of years ago and protected with an international patent. The only problem in massive production is oxidation of substrates for the microcomposite rings, since the frequent exposure of the substrates to extremely aggersive oxygen plasma causes formation of a thick oxide layer that grows from the surface in the form of nanowires with the thickness of about 100nm and length of about 1mm. These structures cause a slow but persisting increase of the recombination coefficient and thus a decrease of the oxygen atom concentration in plasma. Thus, the substrates have to be replaced with new ones frequently. The subject of the proposed project is a systematic study of oxidation phenomena on metals and alloys during exposure to oxygen plasma. The goal is development of substrates that have a long life-time at exposure to cyclic plasma treatments. We will investigate the influence of plasma parameters on the growth and the structure of oxide films on the following materials: aluminum, titanium, iron, stainless steels (including those contaning titanium). Plasma treatments will be performed in the reactor at our Institute, where the highest O density is 1.5x1022 m-3, and in the industrial reactor at Kolektor company, where the highest density is 3x1022m-3. The surface modifications of the test samples will be analized by scanning and transmission electron microscopy (SEM and TEM), Auger-electron depth profiling (AES) and X-ray photoelectron spectroscopy (XPS), while plasma will be characterized with Langmuir and catalytic probes as well as by optical emission spectroscopy (OES). We will also investigate durability of some coatings on the substrates during exposure to oxygen plasma, including oxide ceramics and DLC coatings with a high concentration of sp3 bonds.
Significance for science
Our results represent a breakthrough in synthesis of large quantities on nanomaterials. To the best of our knowledge, it was our group that invented direct synthesis of nanoparticles from solid materials by exposure to highly reactive low temperature plasma. The first paper revealing this technique was published in M. Mozetic et al, Advanced Materials (Impact factor 9.11) in 2005. Since then, over 10 papers were published in prominet international journals including Small (IF 6.41), Chemistry of Materials (IF 4.88), Applied Physics Letters (IF 3.60), Nanotechnology (IF 3.31), Journal of Applied Physics (IF 2.17) and Journal of Physics D: Applied Physics (IF 2.20). The scientific papers, although published recently, have already received almost 300 citations.
Significance for the country
A large number of invited lectures at large international conferences as well as research centres and prominent foreign Universities definitely increases reputation of Slovenia in international scientific and proffesional community. The main goal of this project stated about two years ago when the proposal was prepared, was sistematic research that should answer the question which material is the most resistant to treatments with extremely reactive oxygen plasma used in processing of components made from microcomposite. The material has to fulfill other requirements and should allow for undisturbed production (i.e. several thousand plasma cycles). Originally, we postulated that alloys were not usefull, but surprisingly enough, we found that stanless steel is the most suitable material as long as it is pre treated correctly. Pretreatment is performed by oxidation following a strict protocol. Such oxidation prevents sublimation of microelements at elevated temperature and vacuum conditions and such processed material still retains a relatively low recombination coefficient. We will use this knowledge in development of plasma technologies for other industrial partners.
Most important scientific results Annual report 2008, final report, complete report on dLib.si
Most important socioeconomically and culturally relevant results Annual report 2008, final report, complete report on dLib.si
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