Projects / Programmes
Miniature ceramic low pressure sensors
| Code |
Science |
Field |
Subfield |
| 2.09.06 |
Engineering sciences and technologies |
Electronic components and technologies |
Characterisation of electronic components and materials |
| Code |
Science |
Field |
| T171 |
Technological sciences |
Microelectronics |
| T150 |
Technological sciences |
Material technology |
| P180 |
Natural sciences and mathematics |
Metrology, physical instrumentation |
LTCC technology, thick-film technology, ceramic pressure sensor, low pressure range, piezoelectric sensor, thick-film piezoresistive sensor, capacitive sensor, thick piezoceramic films
Researchers (8)
| no. |
Code |
Name and surname |
Research area |
Role |
Period |
No. of publicationsNo. of publications |
| 1. |
08346 |
Darko Belavič |
Electronic components and technologies |
Researcher |
2007 - 2010 |
683 |
| 2. |
06423 |
PhD Janez Holc |
Materials science and technology |
Researcher |
2007 - 2010 |
862 |
| 3. |
03219 |
PhD Marko Hrovat |
Materials science and technology |
Researcher |
2007 - 2010 |
712 |
| 4. |
19391 |
Mitja Jerlah |
|
Technical associate |
2007 - 2010 |
115 |
| 5. |
02627 |
PhD Marija Kosec |
Electronic components and technologies |
Researcher |
2007 - 2010 |
1,494 |
| 6. |
02572 |
Srečo Maček |
|
Technical associate |
2007 - 2010 |
144 |
| 7. |
04378 |
PhD Marina Santo Zarnik |
Electronic components and technologies |
Head |
2007 - 2010 |
374 |
| 8. |
26468 |
PhD Hana Uršič Nemevšek |
Electronic components and technologies |
Junior researcher |
2007 - 2010 |
681 |
Organisations (2)
Abstract
The project “Miniature ceramic low pressure sensors” is an interdisciplinary applied research study in the field of sensors, thick-film technology, low temperature co-fired ceramic (LTCC) technology and materials, and processing and application of thick piezoceramic films. The main objective is to develop and test materials and advanced technology capabilities for manufacturing miniaturised ceramic electro-mechanical structures of different pressure sensors. The research group has knowledge and experience in research field of ceramic MEMS so that the research activities will start from their extensive background know-how. The feasibility of the ceramic pressure sensors working on three different principles will be studied. The basic construction is a ceramic capsule with a clamped diaphragm on which an appropriate sensing element is processed using thick-film technology. LTCC technology enables higher flexibility in construction, easier integration of the electro mechanical structure with the electronic part of the sensor, smaller dimensions and also increased pressure sensitivity. Emerging advanced LTCC technology capabilities offer great possibilities for manufacturing highly sensitive pressure sensors that would be appropriate for application in the low pressure range.
Significance for science
The investigation has contributed to the development of new technological procedures for processing thee-dimensional (3D) sensor structures with Low Temperature Cofired Ceramic (LTCC) materials and technology. The results achieved also helped with a better understanding of the materials’ functional properties and their compatibility with the relatively reactive LTCC substrate, as well as the interactions between them during processing. Moreover, the development of an up-grade of the conventional LTCC technology for manufacturing ceramic structures with cavities and channels pre-processed or even cofired together with the functional thick-film structures can be considered as an important contribution to the development of the scientific field of materials and technologies. Use of the relatively new ceramic technology together with commercial and also some new thick-film materials (non-commercial thick-film piezoceramic compositions) aimed at manufacturing the ceramic pressure sensors with functional thick-film structures are very attractive for different applications and promising for serial production.
All the results of the project individually and collectively represent an advantageous contribution to the scientific fields and give a push to development of the applied research in the field of the materials and technology for the ceramic micro electro-mechanical structures.
Significance for the country
An important result of the investigation so far is the new knowledge on the unconventional use of LTCC materials and technology and the development of a technological procedure for manufacturing 3D structures with the cavity and thin diaphragm on which appropriate thick-film sensing elements for miniature ceramic pressure sensors are made in post-processing. These results and know-how enable the industrial partner HYB to start with a new project aimed at the development of a new generation of ceramic pressure sensors for the market.
Due to the promising results of the project L2-9583 further investigation on this topic aimed at the development of different ceramic pressure sensors based on LTCC materials and technology was incorporated in the framework of a new Regional Research Centre IN.MEDICAL started recently in this region of the Republic of Slovenia.
The results of the project also contributed to the success in acquiring funding from the Ministry of Science and Technology for the National Center of Excellence NAMASTE, Advanced Materials and Technologies for the Future.
The achievements of project also contribute to the reputation of the research groups involved, and help them to make connections with other research partners in Slovenia and abroad. Currently, the research group is involved in several formal and informal research projects and collaborations on related investigations.
Most important scientific results
Annual report
2008,
2009,
final report,
complete report on dLib.si
Most important socioeconomically and culturally relevant results
Annual report
2008,
2009,
final report,
complete report on dLib.si
