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Projects / Programmes source: ARIS

Processing of ceramic Microelectromechanical systems (MEMS) by novel technologies

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Research activity

Code Science Field Subfield
2.09.01  Engineering sciences and technologies  Electronic components and technologies  Materials for electronic components 

Code Science Field
T150  Technological sciences  Material technology 
Keywords
Electronics, microelectromechanical systems, processing, materials, novel technologies
Evaluation (rules)
source: COBISS
Evaluation of bibliographic research performance indicators according to ARIS methodology
Citations Citations for bibliographic records in COBIB.SI that are linked to records in citation databases
source: WoS source: Scopus source: COBISS
Researchers (14)
no. Code Name and surname Research area Role Period No. of publications
1.  08346  Darko Belavič  Electronic components and technologies  Researcher  2008 - 2011  682 
2.  19319  PhD Milena Mileva Blažić  Literary sciences  Technical associate  2008  1,360 
3.  06896  Silvo Drnovšek    Technical associate  2008 - 2009  305 
4.  06423  PhD Janez Holc  Materials science and technology  Head  2008 - 2011  862 
5.  03219  PhD Marko Hrovat  Materials science and technology  Researcher  2008 - 2011  712 
6.  19391  Mitja Jerlah    Technical associate  2009 - 2011  115 
7.  02627  PhD Marija Kosec  Electronic components and technologies  Researcher  2008 - 2011  1,494 
8.  31064  PhD Alja Kupec  Mechanical design  Junior researcher  2009 - 2011  87 
9.  13369  PhD Danjela Kuščer Hrovatin  Electronic components and technologies  Researcher  2008 - 2011  540 
10.  29877  Branka Perc  Textile and leather  Researcher  2009 - 2011  16 
11.  27820  Tina Ručigaj Korošec    Technical associate  2008 - 2011  0 
12.  04378  PhD Marina Santo Zarnik  Electronic components and technologies  Researcher  2008 - 2011  374 
13.  29681  Miha Skalar    Technical associate  2008  7 
14.  26468  PhD Hana Uršič Nemevšek  Electronic components and technologies  Researcher  2010 - 2011  650 
Organisations (2)
no. Code Research organisation City Registration number No. of publications
1.  0106  Jožef Stefan Institute  Ljubljana  5051606000  90,753 
2.  1704  HIPOT-R&D Research and development in Technologies and Systems  Otočec  5981344  759 
Abstract
The research on processing of MEMS structures is one of the important topics in the filed of electronic components for electronic. Novel methods for processing materials on rigid or flexible substrates enables realization of sensors, actuators and transducers using in the MEMS systems. Processing technique such as inkjet printing and electrophoretic deposition have many benefits including low-cost, repeatability, flexibility, suitability for high throughput production, relatively inexpensive equipment (compared to semiconductor processing), short development time and the capability of depositing a wide range of materials.. The preparation and characteristic of functional materials and suspensions applicable for electrophoretic deposition and ink-jet printing will be studied. Test MEMS structures will be design for evaluations of materials characteristics, and possible changes due to interactions between active and passive thick films will be evaluated. Screen printing, ink-jet printing and electrophoresis technologies for preparation of MEMS structures will be compared.
Significance for science
Within the project we developed materials and processes for fabrication of ceramic microsystems using new technologies. Preparation of materials and suspensions that are suitable for the production layers by electrophoretic deposition and ink-jet printing were studied. By milling and stabilization of suspensions have been successfully prepared under micron sized powders, which is crucial for the further development of suspensions for ink-jet printing. Furthermore, the processes for preparation of stabile suspensions for elecrophoretic deposition have been developed. The processing of thick film layer by electrophoretic deposition was studied. The process is suitable for the fabricate of piezoelectric pressure sensors on thin membranes, where it is practically impossible to do the structure using screen printing technology, manufacture of thin piezoelectric layer on the cantilevers, an ultrasonic transducer with complex structure etc. The piezoelectric layer on ceramic substrate with good functional properties was successfully realized. We were developed procedure for the preparation of thick piezoelectric layers, which are essential for the construction of sensors and actuators. By screen printing technology we were successfully realized and characterized piezoresitive strain sensor on flexible textile substrate. The research on processing with nonconvetional techniques is one of the important topics in the filed of electronic components for electronic. The proposed project enable us to maintain the distinct position in theis research field, i.e., thick film sensors and actuators structures, and to continue to collaborate in international projects and therefore be able to obtain the latest results. The proposed research enable our laboratory improve the knowledge on processing and shaping of ceramics and keep the laboratory in world-leading position in the filed of ceramic processing. Most of obtained results is novel and therefore an original contribution to science.
Significance for the country
Research work on the project has contributed to new knowledge of researchers of two research groups, and introduction of new technology to industrial partner HYB d.o.o. The new advanced technology will enable the development of new innovative products with higher added value and increase the company's competitiveness in the global market of pressure sensors. Participating research organization HIPOT-RR and co-financier and the user company HYB are in Slovenian ownership and are located in the developing region of Slovenia and near the southern border of the EU. In this way, the proposed project also encourages sustain regional development of Slovenia. Research results and their implementation in the products on the market is a positive example of cooperation between the scientific-research society and the industry. Such positive example is very important to promote such cooperation in Slovenia. The results of the research project contributed in creation of two new organisation structures: (i) Centre of Excellence NAMASTE (Advanced Materials and Technologies for the Future) is a multi-disciplinary and trans-disciplinary consortium of research institutions and industry, which include ten research groups, three private research organizations and a number of Slovenian high-tech companies. The partners are spread almost all Slovenian regions. (ii) Development Center In.Medical (Innovative Medical Systems and Treated Methods) was founded in the year 2011 and it is located in South-Eastern region of Slovenia. Dissemination of the research results increases the reputation of the Slovenian research institutions in the European research area.
Most important scientific results Annual report 2008, 2009, final report, complete report on dLib.si
Most important socioeconomically and culturally relevant results Annual report 2008, 2009, final report, complete report on dLib.si
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