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Projects / Programmes source: ARIS

Investigations of methods in vacuum metrology

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Research activity

Code Science Field Subfield
2.09.05  Engineering sciences and technologies  Electronic components and technologies  Vacuum technologies 

Code Science Field
P180  Natural sciences and mathematics  Metrology, physical instrumentation 
T210  Technological sciences  Mechanical engineering, hydraulics, vacuum technology, vibration and acoustic engineering 
Keywords
pressure in the vacuum range, vacuum leak, static expansion method, expansion ratio, rate of presssure rise method, measurement uncertainty, traceability
Evaluation (rules)
source: COBISS
Evaluation of bibliographic research performance indicators according to ARIS methodology
Citations Citations for bibliographic records in COBIB.SI that are linked to records in citation databases
source: WoS source: Scopus source: COBISS
Researchers (12)
no. Code Name and surname Research area Role Period No. of publications
1.  01731  Franc Brecelj  Electronic components and technologies  Researcher  1998 - 1999  102 
2.  07480  Marjan Drab  Electronic components and technologies  Researcher  1998 - 1999  67 
3.  05673  PhD Bojan Erjavec  Electronic components and technologies  Head  1998 - 1999  136 
4.  09846  PhD Lidija Irmančnik-Belič  Chemistry  Researcher  1998 - 1999  99 
5.  01457  Leopold Južina  Manufacturing technologies and systems  Researcher  1998 - 1999  23 
6.  01703  Lidija Koller  Electronic components and technologies  Researcher  1998 - 1999  80 
7.  17829  Marjetka Markovič    Researcher  1998 - 1999  0 
8.  17830  Janez Osredkar    Researcher  1998 - 1999  0 
9.  09619  Karol Požun  Electronic components and technologies  Researcher  1999  56 
10.  01737  MSc Andrej Pregelj  Electronic components and technologies  Researcher  1998 - 1999  248 
11.  04565  Drago Railič  Manufacturing technologies and systems  Researcher  1999  16 
12.  10923  MSc Alenka Šventner Kosmos  Chemistry  Researcher  1998 - 1999  24 
Abstract
We are going to investigate a primary static expansion standard for calibration of vacuum gauges for pressures ranging from 1 kPA to 1.0E-3 Pa. This standard is based on a precise generation of an initial pressure in the rough vacuum range and on a static expansion principle, which leads at a constant temperature of an expansion system to the establishment of certain pressures in the middle and in the high vacuum range. We will study different measurement procedures for the determination of an initial pressure and an expansion ratio as well as the effect of a surrounding temperature and sorption effects on the internal surfaces of the expansion vessel influencing the final measurement uncertainty. - We are going to investigate also a primary method for the determination of small gas flows, such as He flows ranging from 1.0E-12 to 1.0E-15 mol/s. This method is based on measurements of the pressure rise rate in a known volume at a constant temperature. As a source of small gas flows we will use a permeation reference standard, which is based on He permeation from a bigger metallic reservoir, filled with a certain concentration of He, through a glass membrane into vacuum. This standard will be connected to a calibration volume equipped with a sensor which is a part of the gauge head of a spinning rotor gauge. We will study different procedures for the determination of the calibration volume as well as the effects of a surrounding temperature and a residual pressure rise, due to gas desorption from the internal surfaces of the calibration volume, influencing the final measurement uncertainty.
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