This paper reveals scientific backgrounds of technologies based on oxygen plasma treatment of polymer materials. First, we stress the influence of VUV radiation on the surface finish of treated polymers. This is important for our project since we want to avoid synergies with plasma radicals. That’s why we are constructing plasma sources free from the VUV radiation. Further in the paper we reveal the fluence versus the density of atoms in a non-equilibrium state of oxygen. Namely, we can only measure the density, and the fluence is then calculated taking into account different considerations. Major part of the paper deals with functionalization. We launched our hypothesis and explained it theoretically. Further within the project we shall verify the hypothesis experimentally. Finally, we explain another effect of plasma-polymer interaction, i.e. etching.
COBISS.SI-ID: 32907815