1.

LTCC based capacitive pressure sensor with digital output

The manufacturing of the LTCC based capacitive sensor prototypes was presented. The prototypes with the electronics for signal processing was also considered. Special attention was paid to the characterisation of the prototypes. For the initial measurements of the sensor’s characteristics the evaluation board AD 7746 EV was used. Additionally, the electronics for communication with the computer was developed and tested.

F.08 Development and manufacture of a prototype

COBISS.SI-ID: 22406951

2.

Procesing of LTCC-based capacitive sensor structure and evaluation of the capacitive sensor for low energy consumption applications

The results of research and development of the technology for producing 3D LTCC structures with channels and buried cavities (air gaps) for the capacitive sensor were presented. Due to some confidential data (particularly of interest for the industrial partner (HYB)) the results were not published in the open literature.

F.09 Development of a new technological process or technology

COBISS.SI-ID: 22536999