The invention solves micropump technical problem of how to ensure maximum flow-rate and back-pressure performance as well as maximum reliability and long-term stability at small device dimensions. Innovative central cylinder valve positioned at membrane maximum deformation point enables realization of large micropump chamber which improves flow-rate and back-pressure performance considerably. Moreover, innovation increases system compression ratio which results in micropump self-priming and bubble tolerance capability.
F.33 Slovenian patent
COBISS.SI-ID: 10054484The invention solves sensor system for cryogen media characterization. It precisly describes sensor system, which uses optical (reflective and/or transmitive) method for detection of various fases of cryogen media. Sensor system quantitativily determines the ration between gas and liquid fase in the flow of cryogen media.
F.33 Slovenian patent
COBISS.SI-ID: 13228059Recent research activities on micro/nano technologies and structures with emphasis on silicon micromachining in LMSE were reviewed. Latest results were reported and discussed. Possible topics for cooperation were identified.
B.04 Guest lecture
COBISS.SI-ID: 7562324The first part of the invited lecture provides overview of some important micromachining processes and related microstructures which are constitutional structures used for sensing and actuating. The limitations of certain technological approaches are discussed and explained.The second part of the presentation is dedicated to thin film Ti/Pt temperature sensors and microheaters with emphasis on microstructural properties, which affect the electrical resistance. Characterization methods are presented for extraction of TCR and dependency on the thermal annealing parameters. The fabrication process steps provide insight into the integration of temperature sensors and heater on Si platform for microreactor applications. Last part of the presentation focuses on the piezoresistive pressure sensor structure, giving detailed analysis of membrane fabrication process and important mechanical stress issues regarding the thin film deposited layers on the membrane.
B.04 Guest lecture
COBISS.SI-ID: 9562708Presentation of sensor developed for noninvasive sceleton muscles characterisation. Sensor, based on silicon piezoresistors connected into Wheatstone bridge, converts mechanical stresses generated in muscle into electrical signal.
F.06 Development of a new product
COBISS.SI-ID: 30102489