The properties of high-K dielectric films of Ta2O5 and the ternary composition Ta2O5 – Al2O3 – SiO2 with the Ta:Al:Si = 8:1:1 atomic ratio prepared by Chemical Solution Deposition on platinized silicon at temperatures not exceeding 400 oC were studied. All thin films were amorphous, and had smooth and flat surfaces with the average roughness of below 0.5 nm. The mixed oxide samples heated between 300 oC and 400 oC showed little difference in the dielectric permittivity with the values ranging from about 19 to 22. The current-voltage measurements revealed considerably improved characteristics of the Ta2O5 – Al2O3 – SiO2 samples within the investigated heating temperature range, with a significant overall decrease of the leakage currents in contrast to that of the pure Ta2O5 thin films.
COBISS.SI-ID: 27297831
The present study reports on the preparation of solution-derived Ta2O5-based high-K dielectric thin films suitable for transparent electronic devices. Thin films of the ternary composition Ta2O5 – Al2O3 – SiO2 with the Ta:Al:Si = 8:1:1 atomic ratio and pure Ta2O5 were processed at 400 °C. The XPS surface composition analysis showed that the surfaces of both films were fully oxidized. The samples were amorphous, and had smooth and flat surfaces with low average roughness. In the visible range they exhibited optical transparency higher than 70%. Their dielectric permittivity values were in the range from 19 to 25.
COBISS.SI-ID: 27169831
In2O3-ZnO two-dimensional structures were patterned by piezoelectric inkjet printing and heating at 150 oC and 450 oC. Viscosity and surface tension of the ink were adapted to the printer requirements. The printing parameters were optimised to reach the 40 micrometers resolution on glass and SiOx/Si substrates. The patterned structures were amorphous or crystalline upon heating at 150 oC or 450 oC, respectively.
COBISS.SI-ID: 24566311
The paper describes a protocol for processing cost-beneficial, environmentally benign aqueous-type suspensions containing metal-oxide nanostructured particles, and their patterning with piezoelectric ink-jet printing technology. The critical issues relevant to ink-jet printing are the preparation and stabilization of nanosized particles in a fluid and adjusting its physical properties to the values appropriate for a particular ink-jet printer mechanism. For the ink-jet printing experiments of a model titania system, the surface tension and the viscosity of the suspension were modified by the addition of a small amount of the appropriate non-ionic amphiphiles and glycerol. The printing parameters which allowed reproducible patterning of 2D-structures were determined.
COBISS.SI-ID: 25158439