The effect of chemical composition on phase composition, microstructure and dielectric properties of approximately 240 nm thick BaxSr(1-x)TiO3 (x=0.5, 0.4 and 0.3) thin films on polycrystalline alumina substrates was studied. After annealing at 900 oC all films crystallized in pure perovskite phase and had dense and predominantly columnar microstructures. With decreasing Ba content the dielectric permittivity and losses decreased both in kHz and GHz ranges, and a similar trand was observed also for voltage tunability
COBISS.SI-ID: 28069415