The influence of RF generator frequency on plasma parameters was studied. Unlike other authors who use a single-frequency power supply we chose multiple harmonics in order to detect plasma behaviour in such a system. We found that the optical emission intensity of emitting plasma species correlates with the discharge current, whereas the jet length correlates with the voltage amplitude. A high discharge voltage is therefore suitable for treatment of insulating materials in gaps between the electrodes, but high efficiency in terms of selective removal of polymer from the composite surface can be obtained using lower circuit impedance (higher current).
COBISS.SI-ID: 27671591