Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection

We propose the development of new technologies and the improvement of the existing ones for the fabrication of micro/nanosystems (MEMS/NEMS), sensors and transmitters for industry, environmental protection, biomedicine, etc. The stress will be on upgrades of our micro/nanofabrication methods, especially nanolithography (laser writing, e-beam, nanoimprint) and reactive ion etching, to bring our technologies to the European level. We plan to research MEMS/NEMS sensors (pressure, temperature, flow, chemical and biological) and apply them for intelligent transmitters, Ethernet sensors and wireless sensor networks for power industry (our participant) and process industry. A part of the project is dedicated to novel sensors including plasmonic, microcantilever, metamaterial and optoelectronic ones. Currently a rare opportunity exists to further improve the project by investing into upgrades of our technologies which are already unique for the Western Balkans and to use them with the funds received within EU's FP7 as a regional center to bild a center of excellence at the Serbian level. Since the project topics belong to the strategic ones, we believe this would impact the national science as a whole. Our previous results (high technologies being developed for decades, probably the only domestic micro/nanosystem sensors and transmitters, their application in national industry, many publications in international science journals) guarantee sucessful realization of the project.