Maskless photolithography equipment for the fabrication of micro/nano structures and elements

The MicroWriter ML3 Baby is a compact direct-write optical lithography system designed for high-precision fabrication of micro- and nanostructures on photosensitive materials. It features a high-resolution motorized stage capable of patterning areas up to 149 mm x 149 mm. Utilizing an advanced laser writing engine with resolutions down to 1 µm, it eliminates the need for traditional photomasks by enabling direct pattern exposure via intuitive software control. The system supports rapid substrate exchange across a variety of sizes and thicknesses and includes an integrated optical camera for real-time alignment and quality control.

Responsible for equipment: PhD Danilo Vrtačnik
The equipment is located in the cleanroom facilities of the LMSE laboratory, designated for photolithography processes. External users may access the equipment by preparing the required data (layouts), while the remaining photolithography steps are carried out by a qualified operator. Upon prior arrangement, the equipment is generally available without time limitations.