Sinteza in tehnološka realizacija mikrosistemov (Slovene)

According to the advice of the international verification report of the research team of the Laboratory for Microelectronic Technologies we identified a research and technology niche of microsystems which does not require purchasing of new research equipment. The company Rotary Linear Sensors Ltd. (RLS) which successfully exports the products designed and fabricated in Laboratory for Microelectronic Technologies proved this. The program comprises: Microsystems and micromachining technology development based on combination of integrated sensors together with analog and digital electronic for signal processing. The development of the integrated smart sensor systems with sensors for temperature, magnetic field, integrated optical measurement systems and infrared sensor system. The development of electronic sensor subsystems design methodology. The development of process steps and test procedures for pilot line for microsystems fabrication. The development and finalisation of the concept of magnetic sensor array which is patented. The optical system for angular and linear measurement together with analog and digital signal processing would become the most compact encoder available.