Projects / Programmes
Implementation of new technologies in micromachining and smart electronics for pressure and optical sensors
Code |
Science |
Field |
Subfield |
2.09.00 |
Engineering sciences and technologies |
Electronic components and technologies |
|
Code |
Science |
Field |
T170 |
Technological sciences |
Electronics |
T171 |
Technological sciences |
Microelectronics |
T150 |
Technological sciences |
Material technology |
sensors, reliability, electronics for sensor signal conditioning, micromachining
Researchers (14)
no. |
Code |
Name and surname |
Research area |
Role |
Period |
No. of publicationsNo. of publications |
1. |
11682 |
MSc Uroš Aljančič |
Electronic components and technologies |
Researcher |
2004 - 2007 |
206 |
2. |
01926 |
PhD Slavko Amon |
Electronic components and technologies |
Researcher |
2004 - 2007 |
473 |
3. |
08346 |
Darko Belavič |
Electronic components and technologies |
Researcher |
2004 - 2007 |
682 |
4. |
17125 |
Matjaž Cvar |
|
Technical associate |
2004 - 2007 |
8 |
5. |
03333 |
PhD Žarko Gorup |
Electronic components and technologies |
Researcher |
2004 - 2007 |
174 |
6. |
23672 |
Janez Gramc |
|
Technical associate |
2004 - 2007 |
9 |
7. |
19391 |
Mitja Jerlah |
|
Technical associate |
2004 - 2007 |
115 |
8. |
24574 |
Sandi Kocjan |
Electronic components and technologies |
Researcher |
2004 - 2007 |
31 |
9. |
04721 |
PhD Andrej Levstek |
Electronic components and technologies |
Researcher |
2004 - 2007 |
103 |
10. |
20186 |
PhD Matej Možek |
Electronic components and technologies |
Researcher |
2004 - 2007 |
270 |
11. |
16034 |
PhD Marko Pavlin |
Metrology |
Researcher |
2004 - 2007 |
110 |
12. |
05075 |
PhD Drago Resnik |
Electronic components and technologies |
Head |
2004 - 2007 |
261 |
13. |
04378 |
PhD Marina Santo Zarnik |
Electronic components and technologies |
Researcher |
2004 - 2007 |
374 |
14. |
04383 |
PhD Danilo Vrtačnik |
Electronic components and technologies |
Researcher |
2004 - 2007 |
310 |
Organisations (2)
Abstract
Proposed applied research will be strongly supported by fundamental knowledge based on our previous work in the field and further improved with new approaches and results. Important part of this work will consist in implementation of smart electronics to the pressure sensor which will sophisticate significantly the performance of pressure sensors such as temperature compensation, autocalibration of the system and traceability as one of the required parameters on today' market. The possibility of miniaturisation of pressure sensor chip will be another subject of interest in this research. The most important factors which are governing the degree of miniaturisation will be extracted and miniaturisation influence on sensor performances will be determined. On the basis of previous work concerning mechanical stress in thin films, the influence on the pressure sensor response will be further examined with regards to temperature dependency, etc. Long term stability due to this efect will also be taken to consideration.
In the area of optical sensors for advanced measuring techniques we will merge our experience and know-how in the field of silicon micromachining and that of silicon photosensors to obtain a potential application for our SME partner. This device, as a reflexive photosensor is a new technological solution. For the final realization of the device , however some additional theoretical and experimental work will be inevitable, particularly in the field of micromachining silicon micromirrors. On the basis of the results of this study, it is expected that good performances will be obtained.
Results and knowledge gained in the proposed work will serve as a good support to slovene industrial partners, to join and remain in the high-tech area.