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Projects / Programmes source: ARIS

Low power consumption ceramic pressure sensors with digital output

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Research activity

Code Science Field Subfield
2.09.00  Engineering sciences and technologies  Electronic components and technologies   

Code Science Field
T171  Technological sciences  Microelectronics 
T150  Technological sciences  Material technology 
P180  Natural sciences and mathematics  Metrology, physical instrumentation 
Keywords
Ceramic pressure sensors, LTCC technology, thick-film technology, capacitive sensor, piezoelectric resonnce sensor, smart sensors, low energy consumption.
Evaluation (rules)
source: COBISS
Evaluation of bibliographic research performance indicators according to ARIS methodology
Citations Citations for bibliographic records in COBIB.SI that are linked to records in citation databases
source: WoS source: Scopus source: COBISS
Researchers (17)
no. Code Name and surname Research area Role Period No. of publications
1.  11682  MSc Uroš Aljančič  Electronic components and technologies  Researcher  2008 - 2011  206 
2.  01926  PhD Slavko Amon  Electronic components and technologies  Researcher  2008 - 2011  473 
3.  08346  Darko Belavič  Electronic components and technologies  Researcher  2008 - 2011  682 
4.  17125  Matjaž Cvar    Technical associate  2008 - 2011  8 
5.  06423  PhD Janez Holc  Materials science and technology  Researcher  2008 - 2011  862 
6.  03219  PhD Marko Hrovat  Materials science and technology  Researcher  2008 - 2011  712 
7.  19391  Mitja Jerlah    Technical associate  2008 - 2011  115 
8.  24574  Sandi Kocjan  Electronic components and technologies  Researcher  2008 - 2011  31 
9.  02627  PhD Marija Kosec  Electronic components and technologies  Researcher  2008 - 2011  1,494 
10.  13369  PhD Danjela Kuščer Hrovatin  Electronic components and technologies  Researcher  2008 - 2011  540 
11.  02572  Srečo Maček    Technical associate  2008 - 2011  144 
12.  20186  PhD Matej Možek  Electronic components and technologies  Researcher  2008 - 2011  270 
13.  16034  PhD Marko Pavlin  Metrology  Researcher  2008 - 2011  110 
14.  28467  PhD Samo Penič  Electronic components and technologies  Researcher  2008 - 2010  117 
15.  05075  PhD Drago Resnik  Electronic components and technologies  Researcher  2008 - 2011  261 
16.  04378  PhD Marina Santo Zarnik  Electronic components and technologies  Head  2008 - 2011  374 
17.  04383  PhD Danilo Vrtačnik  Electronic components and technologies  Researcher  2008 - 2011  309 
Organisations (3)
no. Code Research organisation City Registration number No. of publications
1.  0106  Jožef Stefan Institute  Ljubljana  5051606000  90,664 
2.  1538  University of Ljubljana, Faculty of Electrical Engineering  Ljubljana  1626965  27,756 
3.  1704  HIPOT-R&D Research and development in Technologies and Systems  Otočec  5981344  759 
Abstract
The proposed project is an interdisciplinary applied-research study in the field of sensors, thick-film technology, low-temperature co-fired ceramic (LTCC) technology and materials, processing and the application of piezoceramic thick films and electronics for smart-sensor systems. The main objective is to develop and test materials and advanced technology capabilities for manufacturing miniaturised and low-energy-consuming ceramic pressure sensors for integration into a wireless-sensors network. In order to achieve a low energy consumption the capacitive and piezoelectric resonance pressure sensors will be investigated. In both cases the basic construction is a ceramic capsule with a thin flexible diaphragm, realised with LTCC technology. In the case of the capacitive sensor the thick-film electrodes will be screen printed and cofired with a 3D LTCC structure. In the case of the piezoelectric resonance sensor the active thick-film PZT structure, which acts as the actuator driving the vibration of the diaphragm and the sensor at the same time, will be made on the pre-fired 3D LTCC structure. Sensor electronics will be designed with the primary aim to have a low-power design, which will facilitate the further implementation of wireless interfaces.
Significance for science
The investigation has contributed to a better understanding of the functional characteristics of low-temperature cofired ceramic materials (LTCC) and the development of a new technological procedure for processing thee-dimensional sensor structures with thin diaphragms. The research of nonconventional applications of the relatively new ceramic technology together with commercial and also some new thick-film materials aimed at manufacturing 3D ceramic sensor structures which are promising for a variety of new applications. The incentive results also stimulate the further development and progress in the field of material science. Furthermore, selection of the capacitive-sensing principle together with the successful realisation of the appropriate ceramic structure enables control over the critical parameters when developing and manufacturing these low-energy-consuming sensors. An additional development of the electronics for capacitance-to-digital conversion and signal conditioning with the primary aspect set to low-power consumption enables a further implementation of the investigated capacitive sensors in modern wireless sensor systems. The results of the laboratory-scale prototypes testing were in good agreement with our expectations and the confirmed regularity of the research hypothesis and in the same time they have pointed up several new research problems for future investigation in the field of low power consumption sensors. All these achievements represent important contributions to the research field of the materials and technology for the ceramic micro-electro-mechanical structures as well as the field of low-energy-consuming electronics. However, this interdisciplinary investigation helps to link together different technological domains.
Significance for the country
The most important result of the investigation so far is the new knowledge on the unconventional use of LTCC materials and technology and the development of a technological procedure for manufacturing an appropriate capacitive sensing element for a miniature ceramic pressure sensing element. These results will enable the industrial partner HYB d.o.o. to develop a new generation of ceramic pressure sensors for the market. Furthermore, the achievements of this applied-research project have already contributed to the reputation of the research groups involved, and helped them to make connections with other research partners in Slovenia and abroad. Currently, the research group in involved in several formal and informal research projects and collaborations on the related investigations (E!4570 IPCTECH Eureka project and the bilateral research collaborations with the Romanian and Polish partners). Furthermore, the results of the project have greatly contributed to the success in acquiring funding from the Ministry of Science and Technology for the Center of Excellence NAMASTE, Advanced Materials and Technologies for the Future for the period between 2009 and 2013.
Most important scientific results Annual report 2008, 2009, final report, complete report on dLib.si
Most important socioeconomically and culturally relevant results Annual report 2008, 2009, final report, complete report on dLib.si
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