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Projects / Programmes source: ARIS

Microstructures and nanostructures

Periods
Research activity

Code Science Field Subfield
2.09.00  Engineering sciences and technologies  Electronic components and technologies   

Code Science Field
T170  Technological sciences  Electronics 
Keywords
microstructures, nanostructures, micromachining, modeling, piezoresistivity, membranes, bossed membranes, microcantilevers, microtips, nanotips, termination structures, 3D structures integration, plasma etching, isotropic etching, anisotropic etching, wafer bonding, thin film deposition, microsensors, microactuators, signal conditioning
Evaluation (rules)
source: COBISS
Researchers (8)
no. Code Name and surname Research area Role Period No. of publicationsNo. of publications
1.  01926  PhD Slavko Amon  Electronic components and technologies  Head  2004 - 2008  473 
2.  06040  PhD Tomaž Amon  Electronic components and technologies  Researcher  2005 - 2008  87 
3.  17125  Matjaž Cvar    Technical associate  2004 - 2008 
4.  01924  PhD Jože Furlan  Energy engineering  Researcher  2005 - 2008  521 
5.  03333  PhD Žarko Gorup  Electronic components and technologies  Researcher  2004 - 2008  174 
6.  04721  PhD Andrej Levstek  Electronic components and technologies  Researcher  2004 - 2008  103 
7.  05075  PhD Drago Resnik  Electronic components and technologies  Researcher  2004 - 2008  261 
8.  04383  PhD Danilo Vrtačnik  Electronic components and technologies  Researcher  2004 - 2008  309 
Organisations (1)
no. Code Research organisation City Registration number No. of publicationsNo. of publications
1.  1538  University of Ljubljana, Faculty of Electrical Engineering  Ljubljana  1626965  27,763 
Abstract
Research work in the frame of this project will be based on the results of previous investigations in the field of micro and nano structures and will be concentrated in the following topics: micromachining, modeling, piezoresistivity, plasma etching, (an)isotropic etching, substrates bonding, depositions of thin films, signal conditioning. Several micro and nano structures used as basic building blocs in microsensors and microactuators, such as membranes, micro and nano tips, termination structures etc. will be investigated, designed, fabricated and characterised. On the basis of the results obtained and basic microstructures fabricated, several 3D microsensor and microactuator structures will be analyzed, designed, fabricated and characterised.
Significance for science
Described investigations in the field of micro/nano structures represent infrastructure and basis for the development of important advanced R&D fields such as science of micro/nano materials and technologies, micro/nano sensors and actuators, MEMS(Micro-Electro-Mechanical Systems), microfluidics, microreactors, numerical modeling of technological processes, numerical modeling of effects in micro/nano structures, information and computer science, advanced electronics of sensor, actuator, controlling and communication systems etc.
Significance for the country
Described investigations in the field of micro/nano materials, technologies and structures have, due to their general, infrastructural nature, a strong impact on socio-economic and cultural progress of Slovenia, similar as it was the case with microelectronics and its impact on the development of computer and information science and technology, influencing then in general the development of slovenian society. Results of such investigations have a strong impact, as predicted by many studies on future development, on the further progress in many important fields of science and technology as well as of the economy in Slovenia, e.g.: - stimulation of productivity, competitiveness and economical growth in the field of advanced technologies and products with high added value - mastering of new systems and services for end users, new working schemes and key technologies - in the field of education of people for industrial needs - access to knowledge by international cooperation with foreign partners on equal basis - accelerated development of technical and engineering practice
Most important scientific results Final report, complete report on dLib.si
Most important socioeconomically and culturally relevant results Final report, complete report on dLib.si
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