Projects / Programmes
Microstructures and nanostructures
January 1, 2014
- December 31, 2017
Code |
Science |
Field |
Subfield |
2.09.00 |
Engineering sciences and technologies |
Electronic components and technologies |
|
2.09.02 |
Engineering sciences and technologies |
Electronic components and technologies |
Electronic components |
Code |
Science |
Field |
T001 |
Technological sciences |
Electronics and Electrical technology |
Code |
Science |
Field |
2.02 |
Engineering and Technology |
Electrical engineering, Electronic engineering, Information engineering |
Researchers (15)
no. |
Code |
Name and surname |
Research area |
Role |
Period |
No. of publicationsNo. of publications |
1. |
11682 |
MSc Uroš Aljančič |
Electronic components and technologies |
Technical associate |
2014 - 2017 |
206 |
2. |
01926 |
PhD Slavko Amon |
Electronic components and technologies |
Researcher |
2014 - 2017 |
473 |
3. |
17125 |
Matjaž Cvar |
|
Technical associate |
2014 - 2017 |
8 |
4. |
34539 |
PhD Tine Dolžan |
Electronic components and technologies |
Junior researcher |
2014 - 2016 |
37 |
5. |
01924 |
PhD Jože Furlan |
Energy engineering |
Researcher |
2014 - 2016 |
521 |
6. |
28464 |
PhD Mateja Hočevar |
Chemistry |
Researcher |
2015 - 2017 |
69 |
7. |
10269 |
PhD Dejan Križaj |
Systems and cybernetics |
Researcher |
2014 - 2017 |
308 |
8. |
04721 |
PhD Andrej Levstek |
Electronic components and technologies |
Researcher |
2014 - 2017 |
103 |
9. |
50660 |
PhD Nina Lokar |
Chemical engineering |
Junior researcher |
2017 |
13 |
10. |
20186 |
PhD Matej Možek |
Electronic components and technologies |
Researcher |
2014 - 2017 |
270 |
11. |
15463 |
PhD Urša Opara Krašovec |
Electronic components and technologies |
Researcher |
2015 - 2017 |
264 |
12. |
30683 |
PhD Borut Pečar |
Electronic components and technologies |
Researcher |
2014 - 2017 |
118 |
13. |
05075 |
PhD Drago Resnik |
Electronic components and technologies |
Researcher |
2014 - 2017 |
261 |
14. |
34538 |
PhD Tjaša Vidmar |
Electronic components and technologies |
Junior researcher |
2015 - 2017 |
27 |
15. |
04383 |
PhD Danilo Vrtačnik |
Electronic components and technologies |
Head |
2014 - 2017 |
310 |
Organisations (1)
Abstract
Proposed research programme in the field of micro/nano structures for the period 2014-17 will be based on well-established high-tech equipment and processes in LMSE / UL FE. and will be upgraded with innovative approaches, leading to novel scientific results, advanced micro/nano structures and their applications.
Research on silicon plasma dry Deep Reactive Ion Etching (DRIE) will be focused on optimization of 2-cycle Bosch process and by upgrading it to multi loop 2-cycle Bosch and 3-cycle Bosch process and directional etching in combination with ICP isotropic etching. Additional research activities in the area of dry etching will be focused on formation of nanostructured »black silicon« and two approaches for releasing microstructures, SF6 inductively coupled plasma (ICP) process and XeF2 isotropic dry etching.
Investigations of PECVD thin dielectric films will be directed into advanced deposition of thin amorphous layers of SiNx, SiOx in SiOxNy with controlled properties, important in development of thin film cantilever and membrane microstructures as well as masking layers in DRIE etching process.
Research in the field of thin metal layers will be directed in the realization of planar microelectrodes, bondable and/or solderable electrical contacts, temperature microsensors and microheaters on different substrates (Si, glass, PDMS, polyimides). Iinvestigations will be extended toward deposition of Cr/Au or Ti/Pt metal layers on 3D structures such as 3D Si microneedle arrays for e.g. bioimpedance measurement electrodes.
The research work in the area of microfluidic technologies will be focused on development of suitable new processes for realization of microcomponents, such as microchannels, dividers, micropumps, microchambers, microvalves, microelectrodes, vias, etc. and integration of sensors, (e.g. pressure, flow) on Si, glass and polymer (PDMS) substrates.
For new material combinations (PDMS/PDMS, PDMS/glass, PDMS/Si), investigation of bonding technologies will be performed, focusing on surface bond preparation and surface modification phenomema.
Research in the field of piezoelectrically actuated structures such as micropumps, will be directed toward miniaturization, increasing back-pressure capability, enabling operation at lower excitation voltages and improved long-term operating stability.
Research activities in the field of micro/nano structures will be supported by numerical simulations with simulation software COMSOL Multiphysics™. Implementation of new physical models into advanced numerical simulations will enable virtual testing of prototypes and optimization of elaborated microsystems.
In the field of smart electronics we will focus on the control algorithms for microfluidic sensors and actuators ( e.g. control of micropumps) and applications of smart sensor concepts for implementation of complex microfluidic regulation.
Significance for science
Proposed investigations in the field of micro/nano structures represent infrastructure and basis for the development of important advanced R&D fields such as science of micro/nano materials and technologies, micro/nano sensors and actuators, MEMS(Micro-Electro-Mechanical Systems), microfluidics, microreactors, numerical modeling of technological processes, numerical modeling of effects in micro/nano structures, information and computer science, advanced electronics of sensor, actuator, controlling and communication systems etc.
Significance for the country
Proposed investigations in the field of micro/nano materials, technologies and structures will have, due to their general, infrastructural nature, a strong impact on socio-economic and cultural progress of Slovenia, similar as was the case with microelectronics and its impact on the development of computer and information science and technology, influencing then in general the development of slovenian society.
Results of such investigations will have a strong impact, as predicted by many studies on future development, on the further progress in many important fields of science and technology as well as of the economy in Slovenia, e.g.:
- stimulation of productivity, competitiveness and economical growth in the field of advanced technologies and products with high added value
- mastering of new systems and services for end users, new working schemes and key technologies
- in the field of education of people for industrial needs
- access to knowledge by international cooperation with foreign partners on equal basis
- accelerated development of technical and engineering practice
Most important scientific results
Annual report
2014,
2015,
2016,
final report
Most important socioeconomically and culturally relevant results
Annual report
2014,
2015,
2016,
final report