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Projects / Programmes source: ARIS

Microstructures and nanostructures

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Periods
January 1, 2014 - December 31, 2017
Research activity

Code Science Field Subfield
2.09.00  Engineering sciences and technologies  Electronic components and technologies   
2.09.02  Engineering sciences and technologies  Electronic components and technologies  Electronic components 

Code Science Field
T001  Technological sciences  Electronics and Electrical technology 

Code Science Field
2.02  Engineering and Technology  Electrical engineering, Electronic engineering, Information engineering 
Evaluation (rules)
source: COBISS
Evaluation of bibliographic research performance indicators according to ARIS methodology
Citations Citations for bibliographic records in COBIB.SI that are linked to records in citation databases
source: WoS source: Scopus source: COBISS
Researchers (15)
no. Code Name and surname Research area Role Period No. of publications
1.  11682  MSc Uroš Aljančič  Electronic components and technologies  Technical associate  2014 - 2017  0 
2.  01926  PhD Slavko Amon  Electronic components and technologies  Researcher  2014 - 2017  0 
3.  17125  Matjaž Cvar    Technical associate  2014 - 2017  0 
4.  34539  PhD Tine Dolžan  Electronic components and technologies  Junior researcher  2014 - 2016  0 
5.  01924  PhD Jože Furlan  Energy engineering  Researcher  2014 - 2016  0 
6.  28464  PhD Mateja Hočevar  Chemistry  Researcher  2015 - 2017  0 
7.  10269  PhD Dejan Križaj  Systems and cybernetics  Researcher  2014 - 2017  0 
8.  04721  PhD Andrej Levstek  Electronic components and technologies  Researcher  2014 - 2017  0 
9.  50660  PhD Nina Lokar  Chemical engineering  Junior researcher  2017  0 
10.  20186  PhD Matej Možek  Electronic components and technologies  Researcher  2014 - 2017  0 
11.  15463  PhD Urša Opara Krašovec  Electronic components and technologies  Researcher  2015 - 2017  0 
12.  30683  PhD Borut Pečar  Electronic components and technologies  Researcher  2014 - 2017  0 
13.  05075  PhD Drago Resnik  Electronic components and technologies  Researcher  2014 - 2017  0 
14.  34538  PhD Tjaša Vidmar  Electronic components and technologies  Junior researcher  2015 - 2017  0 
15.  04383  PhD Danilo Vrtačnik  Electronic components and technologies  Head  2014 - 2017  0 
Organisations (1)
no. Code Research organisation City Registration number No. of publications
1.  1538  University of Ljubljana, Faculty of Electrical Engineering  Ljubljana  1626965  65 
Abstract
Proposed research programme in the field of micro/nano structures for the period 2014-17 will be based on well-established high-tech equipment and processes in LMSE / UL FE. and will be upgraded with innovative approaches, leading to novel scientific results, advanced micro/nano structures and their applications. Research on silicon plasma dry Deep Reactive Ion Etching (DRIE) will be focused on optimization of 2-cycle Bosch process and by upgrading it to multi loop 2-cycle Bosch and 3-cycle Bosch process and directional etching in combination with ICP isotropic etching. Additional research activities in the area of dry etching will be focused on formation of nanostructured »black silicon« and two approaches for releasing microstructures, SF6 inductively coupled plasma (ICP) process and XeF2 isotropic dry etching. Investigations of PECVD thin dielectric films will be directed into advanced deposition of thin amorphous layers of SiNx, SiOx in SiOxNy with controlled properties, important in development of thin film cantilever and membrane microstructures as well as masking layers in DRIE etching process. Research in the field of thin metal layers will be directed in the realization of planar microelectrodes, bondable and/or solderable electrical contacts, temperature microsensors and microheaters on different substrates (Si, glass, PDMS, polyimides). Iinvestigations will be extended toward deposition of Cr/Au or Ti/Pt metal layers on 3D structures such as 3D Si microneedle arrays for e.g. bioimpedance measurement electrodes. The research work in the area of microfluidic technologies will be focused on development of suitable new processes for realization of microcomponents, such as microchannels, dividers, micropumps, microchambers, microvalves, microelectrodes, vias, etc. and integration of sensors, (e.g. pressure, flow) on Si, glass and polymer (PDMS) substrates. For new material combinations (PDMS/PDMS, PDMS/glass, PDMS/Si), investigation of bonding technologies will be performed, focusing on surface bond preparation and surface modification phenomema. Research in the field of piezoelectrically actuated structures such as micropumps, will be directed toward miniaturization, increasing back-pressure capability, enabling operation at lower excitation voltages and improved long-term operating stability. Research activities in the field of micro/nano structures will be supported by numerical simulations with simulation software COMSOL Multiphysics™. Implementation of new physical models into advanced numerical simulations will enable virtual testing of prototypes and optimization of elaborated microsystems. In the field of smart electronics we will focus on the control algorithms for microfluidic sensors and actuators ( e.g. control of micropumps) and applications of smart sensor concepts for implementation of complex microfluidic regulation.
Significance for science
Proposed investigations in the field of micro/nano structures represent infrastructure and basis for the development of important advanced R&D fields such as science of micro/nano materials and technologies, micro/nano sensors and actuators, MEMS(Micro-Electro-Mechanical Systems), microfluidics, microreactors, numerical modeling of  technological processes, numerical modeling of effects in micro/nano structures, information and computer science, advanced electronics of sensor, actuator, controlling and communication systems etc.
Significance for the country
Proposed investigations in the field of micro/nano materials, technologies and structures will have, due to their general, infrastructural nature, a strong impact on socio-economic and cultural progress of Slovenia, similar as was the case with microelectronics and its impact on the development of computer and information science and technology, influencing then in general the development of slovenian society. Results of such investigations will have a strong impact, as predicted by many studies on future development, on the further progress in many important fields of science and technology as well as of the economy in Slovenia, e.g.: - stimulation of productivity, competitiveness and economical growth in the field of advanced technologies and products with high added value - mastering of new systems and services for end users, new working schemes and key technologies - in the field of education of people for industrial needs - access to knowledge by international cooperation with foreign partners on equal basis - accelerated development of technical and engineering practice
Most important scientific results Annual report 2014, 2015, 2016, final report
Most important socioeconomically and culturally relevant results Annual report 2014, 2015, 2016, final report
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