Projects / Programmes
Microstructures and nanostructures
January 1, 2009
- December 31, 2013
Code |
Science |
Field |
Subfield |
2.09.00 |
Engineering sciences and technologies |
Electronic components and technologies |
|
Code |
Science |
Field |
T170 |
Technological sciences |
Electronics |
Code |
Science |
Field |
2.02 |
Engineering and Technology |
Electrical engineering, Electronic engineering, Information engineering |
microstructures, nanostructures, micromachining, modeling, piezoresistivity, membranes, bossed membranes, microcantilevers, microtips, nanotips, termination structures, 3D structures integration, plasma etching, isotropic etching, anisotropic etching, wafer bonding, thin film deposition, microsensors, microactuators, signal conditioning
Researchers (13)
no. |
Code |
Name and surname |
Research area |
Role |
Period |
No. of publicationsNo. of publications |
1. |
11682 |
MSc Uroš Aljančič |
Electronic components and technologies |
Technical associate |
2013 |
206 |
2. |
01926 |
PhD Slavko Amon |
Electronic components and technologies |
Head |
2009 - 2013 |
473 |
3. |
06040 |
PhD Tomaž Amon |
Electronic components and technologies |
Researcher |
2009 - 2012 |
87 |
4. |
17125 |
Matjaž Cvar |
|
Technical associate |
2009 - 2013 |
8 |
5. |
34539 |
PhD Tine Dolžan |
Electronic components and technologies |
Junior researcher |
2011 - 2013 |
37 |
6. |
01924 |
PhD Jože Furlan |
Energy engineering |
Researcher |
2009 - 2013 |
521 |
7. |
03333 |
PhD Žarko Gorup |
Electronic components and technologies |
Researcher |
2009 - 2013 |
174 |
8. |
10269 |
PhD Dejan Križaj |
Systems and cybernetics |
Researcher |
2009 - 2013 |
308 |
9. |
04721 |
PhD Andrej Levstek |
Electronic components and technologies |
Researcher |
2009 - 2013 |
103 |
10. |
20186 |
PhD Matej Možek |
Electronic components and technologies |
Researcher |
2009 - 2013 |
270 |
11. |
30683 |
PhD Borut Pečar |
Electronic components and technologies |
Researcher |
2013 |
118 |
12. |
05075 |
PhD Drago Resnik |
Electronic components and technologies |
Researcher |
2009 - 2013 |
261 |
13. |
04383 |
PhD Danilo Vrtačnik |
Electronic components and technologies |
Researcher |
2009 - 2013 |
309 |
Organisations (1)
Abstract
Research work in the frame of this project will be based on the results of previous investigations in the field of micro and nano structures and will be concentrated in the following topics:
micromachining, modeling, piezoresistivity, plasma etching, (an)isotropic etching, substrates bonding, depositions of thin films, signal conditioning.
Several micro and nano structures used as basic building blocs in microsensors and microactuators, such as membranes, micro and nano tips, termination structures etc. will be investigated, designed, fabricated and characterised.
On the basis of the results obtained and basic microstructures fabricated, several 3D microsensor and microactuator structures will be analyzed, designed, fabricated and characterised.
Significance for science
Reported investigations in the field of micro/nano structures represent an infrastructural basis for further development of advanced R&D fields such as science of micro/nano materials and technologies, micro/nano sensors and actuators, MEMS(Micro-Electro-Mechanical Systems), microfluidics, microreactors, numerical modeling of technological processes, numerical modeling of effects in micro/nano structures, in information and computer science, in advanced electronics of sensor, actuator, in controlling and communication systems and others. Scientific results of these investigations were published in relevant journals and conferences.
Significance for the country
Research program investigations in the field of micro/nano materials, technologies and structures will have, due to their general, infrastructural nature, a strong impact on socio-economic and cultural progress of Slovenia, similar as was the case with microelectronics and its impact on the development of computer and information science and technology, influencing then in general the development of slovenian society. Results of these investigations will have a strong impact, as predicted also by numerous studies on future development, to further progress in many important fields of science, technology and economy in Slovenia, e.g.: - stimulation of productivity, competitiveness and economical growth in the field of advanced technologies and products with high added value - mastering of new systems and services for Slovenian end users, new working schemes and key technologies - in the field of education of Slovenian people for industrial needs - access to knowledge by international cooperation with foreign partners on equal basis - development of technical and engineering practice in Slovenia
Most important scientific results
Annual report
2009,
2010,
2011,
2012,
final report,
complete report on dLib.si
Most important socioeconomically and culturally relevant results
Annual report
2009,
2010,
2011,
2012,
final report,
complete report on dLib.si